Wafer Storage Desiccator Cabinets

Cleatech’s Wafer Storage Desiccator Cabinet provides storage of up to 12" silicon wafer carriers in a particle-free nitrogen environment. Designed for optimal storage density of 200mm or 300mm wafers. Theses wafer desiccator cabinets are also available in Desiccant type providing isolated atmosphere chambers without having back plenum and gas ports.

Choose the optional Automatic nitrogen-purge control unit and humidity sensor which are capable of measuring and displaying humidities in the range 5-100%RH, Accurately Controls Pre-Set Relative Humidity (+/- 2% RH) and Reduces Nitrogen Consumption to 75%.

Standard Features

Standard Options

•	Heavy-duty Powder coated steel stand
•	Lockable casters for large capacity desiccator cabinets enhanced mobility
•	Gas-in Port and Adjustable Auto pressure relief valve relives excess nitrogen (N2)
•	An Automatic nitrogen purge control unit provides automatic low-humidity control capable of measuring and displaying humidity inside the Desiccator cabinet in the range: 5-100%RH, Accurately Controls Pre-Set Relative Humidity (+/- 2% RH). While inside humidity level is below set point the system provides low purge (2-20 Cubic feet per hour). Maintain positive pressure inside the desiccator chambers to have free contaminants and moisture environment. When the moisture climbs above an adjustable set point the system automatically activates high-flow purge (0.5 - 60 PSI). >> In One-channel purge control unit, there is only one humidity sensor which is installed in the lower chamber of multi-chamber desiccators. There are some perforated holes between chambers which connect the chambers together. >> For more critical requirements, select the Multi-Channel nitrogen purge control unit. For each chamber there is separated sensor and controller. When any door opens the system responses much faster to the sudden RH% increase. Minimum system includes: Digital Humidity monitor to display and set the humidity level. Dual Scale 0-60 PSI/400 Kpa Gauge indicating regulated input pressure 0.5 - 60 PSI Pressure Regulator for control of high purge flow 2-20 SCFH Flowmeter allows control of minimum maintaining flow External Humidity Sensor accurately measures relative humidity (+/-2%RH) and easy to connect to the Purge control unit Two In/Out Push-to-connect nitrogen ports for 1/4" tubing

•	1/4" thickness clear Acrylic or Static-Dissipative PVC
•	Preserves moisture-sensitive wafers in a dry, dust-free environment
•	Designed specifically for standard lot boxes, carriers used for 200mm and 300mm wafers.
•	Stainless Steel door hinge for maximum door support
•	Chrome Plated Lift-and-turn Compression Latch for perfect door Seals
•	Rubber Bulb, Vinyl one-piece door sealing
•	Removable Plenum chamber minimizes backfill ensures uniform gas distribution
•	304 stainless steel door frame extend service lifetime and improve sealing performance
•	Grounded rack , hinge and door latch provide additional ESD safety

* Wafer Containers 11"W x 11"D x 10" H Maximum.
** Wafer Containers 151/2"W x 101/2"D x 13" H Maximum.

*** Acrylic is damaged by alcohol and other cleaning agents.

Prices include Stainless steel door frame, Stainless steel hinge and latch

Basically, the Desiccator cabinet prevents oxidation of MSD by controlling moisture in the cabinet. Specially, in the making using of semiconductor silicon wafers, Cleatech's low humidity desiccators would be perfect as it would provide a dry and dirt-free storage. More often than not, the clean floor space and cabinet is more expensive than the price of wafer produced. This product increase would usually apply in the various MSDs that would require storage with dust-free controlled environment.

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Prices below include up to 25% Discount
Available Limited Time

Other Desiccators:

? Dimension Guide

* No Flowmeter is required if choosing Nitrogen Purge Control unit
** Gas-in port and pressure relief valve are required for Nitrogen purge deisccators

Removable Plenum chamber minimizes backfill ensures uniform gas distribution

Overal Size W" x D" x H"	Wafer Size	No. Of Chambers	Storage Capacity	Chamber Clearance W" x D" x H"	Clear Acrylic ***		Static-Dissipative PVC
26 1/2x25x48	8 Inch	4	16*	25x23x10 13/16	1510-4-A	$2,420.00	1510-4-B	$3,940.00
26 1/2x25x60	8 Inch	5	20*	25x23x10 13/16	1510-5-C	$2,860.00	1510-5-D	$4,395.00
53x25x36	8 Inch	6	24*	25x23x10 13/16	1510-6-E	$3,610.00	1510-6-F	$5,665.00
53x25x48	8 Inch	8	32*	25x23x10 13/16	1510-8-G	$4,410.00	1510-8-H	$6,940.00
53x25x60	8 Inch	10	40*	25x23x10 13/16	1510-10-K	$5,590.00	1510-10-L	$8,745.00
19x25x64	12 inch	4	8**	17 7/16x23x14 1/2	1510-4-M	$2,720.00	1510-4-N	$4,275.00
38x25x64	12 inch	8	16**	17 7/16x23x14 1/2	1510-8-O	$4,310.00	1510-8-P	$6,450.00
38x29x64	12 inch	8	16	17 7/16x27x14 1/2	1510-8-Q	$4,750.00	1510-8-R	$7,120.00

Option Code	Description	Price
1580-1-OP	One-Channel Nitrogen-Purge Control Unit with one humidity sensor installed in lower chamber *	$1235.00
1550-4-OP1	Flowmeter, range 2-20 SCFH air. with Valve-External Mount	$115.00
1550-1-OP2	Gas-in Port & Pressure Relief Valve **	$78.00

Stand Code	Description	Price
1550-1-OP5	Stand with Caster- Powder Coated Steel- Single Column	$385.00
1550-1-OP6	Stand with leveling mount- Powder Coated Steel- Single Column	$338.00
1550-1-OP7	Stand with Caster- Powder Coated Steel- Double Columns	$635.00
1550-1-OP8	Stand with leveling mount- Powder Coated Steel- Double Columns	$595.00